Quartz Deposition Rate Monitor

Industry standard deposition rate/thickness monitor for control of thin film deposition.

The QO 40A1 quartz deposition rate monitor provides a real-time, progressive indication of coating thickness during deposition, allowing the production of coatings of high accuracy and reproducibility. The thickness of both evaporated and sputter coated films can be monitored. The sensor head is a water cooled, non-magnetic housing which is permanently positioned in the vacuum system. The crystal face is parallel to the water cooling feedthrough pipes. The QO 40A1 is mounted on a DN 40CF flange with two 3mm O.D. pipes and Microdot S-50 coaxial connector.

Additional Information:

  • simultaneous measurement of thickness, rate & frequency from both channels
  • user defined materials list and/or manual configuration of material density and acoustic impedance 
  • user defined endpoint, tolling factors and primary sensor type
  • store and recall of user defined configurations
  • graphical annotation and operations such as thickness delta, time delta and frequency rate in time

 

QO40A Quartz Deposition Rate Monitor:

 

  • non-magnetic materials
  • water cooled
  • operation up to 300degC
  • industry standard 14mm dia crystal
  • software controlled, web enabled
Quartz Deposition Rate Monitor

Deposition Rate Controller:

 Creator Software Module:

Quartz Deposition Rate Monitor ControllerQuartz Deposition Rate Monitor Software
  
Dimensions:
 
 Quartz Deposition Rate Monitor Schematic

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