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Quartz Thickness Monitor / Deposition Rate Monitor |
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Industry standard quartz thickness monitor / deposition rate monitor for control of thin film deposition.
QO40A1 Quartz Thickness Monitor / Deposition Rate Monitor: Overview
The QO 40A1 quartz thickness monitor / deposition rate monitor provides a real-time, progressive indication of coating thickness during deposition, allowing the production of coatings of high accuracy and reproducibility. The thickness of both evaporated and sputter coated films can be monitored. The sensor head is a water cooled, non-magnetic housing which is permanently positioned in the vacuum system. The crystal face is parallel to the water cooling feedthrough pipes. The QO 40A1 is mounted on a DN 40CF flange with two 3mm O.D. pipes and Microdot S-50 coaxial connector. QO40A1 Quartz Thickness Monitor / Deposition Rate Monitor: Features
- simultaneous measurement of thickness, rate & frequency from both channels
- user defined materials list and/or manual configuration of material density and acoustic impedance
- user defined endpoint, tolling factors and primary sensor type
- store and recall of user defined configurations
- graphical annotation and operations such as thickness delta, time delta and frequency rate in time
QO40A Quartz Thickness Monitor:
- non-magnetic materials
- water cooled
- operation up to 300degC
- industry standard 14mm dia crystal
- software controlled, web enabled
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Thickness Monitor Controller: | Creator Software Module: |  |  |
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