Ion flood gun source for sample surface cleaning in UHV applications.

The ion flood source IS 40C1 is a compact, easy-to-use extractor type ion source for sample surface cleaning. It is mounted on a DN 40CF flange and powered by a slim, 19” rack mounted digital power supply.

The source generates an ion current of 15-25μA/cm2 (Argon) With Gaussian beam profile. The beam diameter and current density depend on the source-to-sample distance. The mounting length of the source is adaptable to individual requirements (standard is 63mm).

There is a Direct Gas Inlet in the ionisation volume via an integrated DN 16CF port. The Y-oxide coated iridium filament is arranged in a non-line-of sight configuration is suitable for operation with all noble gases and with reactive gases such as O2, H2 and CH4 (but with correspondingly reduced lifetime).

The special arrangement of the accelerating electrode and anode ensures very long term stability characteristics. The ion current can be varied over a wide range.

You can download the data sheet here;  Prevac Cleaning & Prep Ion Source IS40 C1

IS40C1 Ion Flood Source: 0.12keV to 5keV energy range 15-25μA/cm2 (Argon) operation with other gases Ion Source Power Supply IS40C-PS full software control, web enabled Linear Shift (optional)

Power Supply:	Creator Software Module:
Dimensions:

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