High Pressure Residual Gas Analysers Uk Supplier

Resdiual Gas Analysers (RGA) for High Pressure Vacuum Processing Applications

The HPQ2 and HPQ2S represent the latest in pump free, high pressure process residual gas analyser technology, with performance consistent with traditional residual gas analysers. The HPQ2 and HPQ2S residual gas analyser range are ideal for a wide range of vacuum related process monitoring applications because they operate at higher process pressures and do not require a support pumping package. The resulting system is less complex, with reduced installation and ongoing service requirements, offering a higher level of reliability at a substantially lower cost.

HPQ2/HPQ2S High Pressure Residual Gas Analyser Technology:

High intrinsic sensitivity.
Gas specific high pressure algorithms.
Measure gas composition trends.
Instant alert to deviations.

High Pressure Residual Gas Analyser, MKS Web-Enabled HPQ Series

Simultaneous Display/Wide Dynamic Range:	Real-Time Gas Composition Analysis:

High Pressure Residual Gas Analyser	HPQ2	HPQ2S
Mass Range	2-80 amu	2-80 amu
Detector	Faraday	Faraday
Max Operating Pressure	1 mTorr	up to 8 mTorr*
Min Detectable Concentration	5 ppm	5ppm
Stability	better than +/- 0.1 amu over 8 hours
Resolution	1 amu at 10% peak height
Bakeout Temperature	250 degree C
Mounting Flange	DN-35-CF
Ion Source	twin filament
Electron Energy	set through Process Eye 2000 recipe
Emission Current	set through Process Eye 2000 recipe
* process dependent

Download Data Sheet: icon MKS HPQ Data Sheet (284.13 kB)

We also have a simple Introduction to Mass Spectrometry that might be of interest and there are many more resources in our Links section.

For additional information on our range of quadrupole mass spectrometers, if you have any questions, or to request a quotation, please contact us.