Residual Gas Analyzers (RGA) for Vacuum Applications

The new range of eVision2 residual gas analyzers with web-enabled technology deliver unrivalled data acquisition speed and quality not possible with previous RGA designs. Patented technology ensures millisecond data point collection even over the full dynamic measurement range and without any loss of data quality. Perfect for rapid leak detection, accurate vacuum diagnostics, chamber diagnostics and contamination monitoring, eVision2 residual gas analyzers provide all the answers...fast.


Integrated, Web-Enabled Residual Gas Analyzers:

  • Integrated web server, operate your residual gas analyzer and review data from anywhere in the world, or just from your desk.eVision2 Residual Gas Analyzer (RGA)
  • Compatible with all instruments in the MKS process residual gas analyzer range.
  • Multiple modes of operation for both process residual gas analysis and general vacuum troubleshooting and diagnostics.
  • Operation over any TCP/IP network, including the internet.

Residual Gas Analyzers with Clear Technology Leadership:

  • Intelligent acquisition that skips larger peaks if requested to do so in order to increase electron multiplier lifetime (download application note here).
  • Fastest data acquisition over largest dynamic range of any commercial residual gas analyzer. Performance only previously possible with very expensive ion counting mass spectrometers. Perfect for closed-loop control applications and fast event studies.


Advanced RGA Web Browser Applet:

Optional EasyViewTM Application:
Residual Gas Analyzer (RGA) SoftwareResidual Gas Analyzer (RGA) Software


UHV Surface Analysis Diagnostics:


 Residual Gas Analzer Installed in UHV Surface Analysis Equipment


Residual Gas Analyzer

 e-Vision2

Mass Range 100 or 200 amu
Detector Faraday only or dual Faraday/SEM
Max Operating Pressure

 1E-4 Torr


Min Detectable Partial Pressure

(3σ baseline noise at 300ms integration)

 2E-11 Torr (Far)

 5E-14 Torr (SEM)

Stability Better than +/- 0.1 amu over 8 hours
Resolution
 Better than 10% valley throughout mass range
Bakeout Temperature 250 degree C
Mounting Flange DN-35-CF
Operating Temperature
200°C Faraday only with electronics <40°C
150°C Multiplier with electronics <40°C and pressure <1e-8 mbar
90°C Multiplier with electronics <40°C and pressure <1e-5 mbar
Mass Filter 100mm


Residual Gas Analyzer Electronics

 e-Vision2

Mounted Weight on Flange
1.7kg
Power24V DC, 2A external universal voltage supply (included)
Communication

10/100 Base-T Ethernet, static or automatically assigned IP addresses


Data collection methodsAnalogue scanning, full mass range 8, 16 or 32 points/amu
Barchart scanning
Peak-jump collection of up to 15 peaks per scan
Maximum data acquisition speed<3ms per point for analogue scans
Settling time from Full Range to
Baseline Signal
<20ms
Control method CE operating system processor with web-server interface
Filament protectionOpto-isolated input for filament protect or control
Software
Built-in web applications allowing RGA control and data aquisition without installed software using web browser on any PC
Optional EasyView for Windows 2000, XP or Vista


Download Data Sheet: icon eVision2 Residual Gas Analyzer Data Sheet (492.66 kB)

Download Analyser Dimensions: icon eVision2 Residual Gas Analyzer Dimensional Drawing (699.63 kB)


Related products: custom vacuum systems, custom vacuum chambers, vacuum system controllers, vacuum accessories


We also have a simple Introduction to Mass Spectrometry that might be of interest and there are many more useful resources in our Links section.

For additional information about our range of residual gas analysers, if you have any questions, or to request a quotation, please contact us.

 
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