Vision 2000-B RGA: Residual Gas Analysers for General Vacuum Diagnostics

Vision 2000-B residual gas analyser is the analysers of choice for vacuum diagnostics, chamber pumpdown and baseline characteristics.

The Vision 2000-B residual gas analyser is an application-specific residual gas analyser designed to monitor vacuum pumpdown, baseline, and leakback conditions in thin film processing and to alert of conditions that can negatively impact processing conditions. In addition, the Vision 2000-B residual gas analyser provides the information required to optimise vacuum quality with both residual gas monitoring (including air and water), and contaminant monitoring (including hydrocarbons).

Vision 2000-B Residual Gas Analyser Technology:

  • Contamination resistant double filter quadrupole analyser
  • Analyser housing
  • Pneumatic isolation valve
  • Dual filament open ion source
  • Process Eye control platform

Simultaneous Display/Wide Dynamic Range: Analyser Schematic:
Residual Gas Analyser Software Residual Gas Analyser Schematic

Vision 2000-B Residual Gas Analyser

Mass Range 1-100 amu standard, up to 300 amu optional
Detector Dual Faraday/SEM
Analyser Double filter quadrupole mass spectrometer
Max Operating Pressure 7.6E-5 Torr
Min Detectable Partial Pressure 2E-11 Torr (Far), 5E-14 Torr (SEM)
Stability Better than +/- 0.1 amu over 8 hours
Resolution Better than 10% valley throughout mass range
Ion Source Open, radial, twin filament
Vacuum Hardware Analyser housing plus pneumatic isolation valve. Option pressure gauge.

Download Data Sheet: icon Vision2000B Data Sheet (257.94 kB)

We also have a simple Introduction to Mass Spectrometry that might be of interest and there are many more resources in our Links section.

For additional information on these services, if you have any questions, or to request a quotation, please contact us.

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