Vision 1000-B RGA: Residual Gas Analyzers for General Vacuum Diagnostics

Simplicity & accuracy. The residual gas analyzers of choice for vacuum diagnostics, chamber pumpdown and baseline characteristics.

The Vision 1000-B baseline monitor is an application-specific residual gas analyzer designed to monitor vacuum pumpdown, baseline, and leakback conditions in thin film processing and to alert of conditions that can negatively impact processing conditions. In addition, the Vision 1000-B residual gas analyzer provides the information required to optimise vacuum quality with both residual gas monitoring (including air and water), and contaminant monitoring (including hydrocarbons).

Vision 1000-B Residual Gas Analyzer Technology:

Contamination resistant double filter quadrupole analyzer
Heated analyzer housing
Pneumatic isolation valve
Dual filament open ion source
Process Eye control platform

Residual Gas Analyzer for Vacuum Chamber Diagnostics

Simultaneous Display/Wide Dynamic Range:	Analyser Schematic:

Vision 1000-B Residual Gas Analyzer
Mass Range	1-100 amu standard, up to 300 amu optional
Detector	Dual Faraday/SEM
Analyzer	Double filter quadrupole
Max Operating Pressure	1E-4 Torr
Min Detectable Partial Pressure	2E-11 Torr (Far), 5E-14 Torr (SEM)
Stability	Better than +/- 0.1 amu over 8 hours
Resolution	Better than 10% valley throughout mass range
Ion Source	Open, radial, twin filament
Vacuum Hardware	Bakeout jacket (200 degC), pneumatic isolation valve

Download Data Sheet: icon MKS Vision 1000B Data Sheet (225.55 kB)

We also have a simple Introduction to Mass Spectrometry that might be of interest and there are many more resources in our Links section.

For additional information on these services, if you have any questions, or to request a quotation, please contact us.