Vision 2000-P RGA: Residual Gas Analyser for PVD

Application specific residual gas analysers for PVD. Automated GO/NO-GO status based on ppb level detection of contaminants. Field proven routines will alarm on, and suggest causes for, common residual gas problems in PVD processes.

The Vision 2000-P is an application specific residual gas analyser for PVD. It represents a different concept in PVD monitoring, requiring minimum operator interaction or knowledge of residual gas analysers. The Vision 1000-P consists of smart-head residual gas analyser technology with a closed ion source and close-coupled inlet. This state-of-art residual gas analyser technology is integrated with Process Eye Professionalâ„¢ Control Platform, a recipe based, user-configurable software program. The technology advances incorporated in the Vision 1000-P residual gas analyser provides users with simple, effective, process monitoring operation including; ppb level detection of contaminant gases during PVD processes, faster PM recovery through vacuum analysis, constant baseline vacuum troubleshooting, single push button operation to start recipes.


Vision 2000-P PVD Residual Gas Analyser Technology:

  • PVD process compatible materials throughout
  • Heated analyser housing
  • Unibloc inlet valve
  • Dual filament high conductance closed ion source
  • Process Eye Professional control platform
Residual Gas Analyser for PVD 


Wide Dynamic Range & Intergration of External Power Supply Signals: Unibloc Intelligent Inlet Valve:
Residual Gas Analyser Software for PVD Residual Gas Analyser Inlet for PVD


Vision 2000-P PVD Residual Gas Analyser


Mass Range 1-100 amu standard, up to 300 amu optional 
Detector Dual Faraday/SEM
Analyser Double filter quadrupole mass spectrometer
Inlet Pressure Ranges 7.6E-3 Torr (1E-2mbar), higher pressure range options
Mounting FlangeDN35 CF
Min Detectable Partial Pressure <2E-11 Torr
Min Detectable Concentration <100 ppb for non-interfering species
Stability Better than +/- 0.1 amu over 8 hours
Resolution Better than 10% valley throughout mass range


Related products: deposition systems, Langmuir probe, ion energy analyser

Download Data Sheet: icon Vision2000P Data Sheet (274.98 kB)

We also have a simple Introduction to Mass Spectrometry that might be of interest and there are many more resources in our Links section.

For additional information on these services, if you have any questions, or to request a quotation, please contact us.

 
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