Vision 2000-C RGA: Residual Gas Analyser for CVD

Accurate, precise residual gas analysis identification & tracking in chamber clean, passivation sequences and deposition steps for various CVD processes.

The Vision 2000-C consists of “smart head” residual gas analyser technology with a closed ion source and close-coupled inlet. This state-of-art residual gas analyser technology is integrated with Process Eye control platform, a recipe based, user-configurable software program. The combination of high conductance closed ion source and automated inlet allows seamless monitoring of the complete CVD process cycle, from base vacuum to process pressures of up to 700 Torr. By maximising the ratio between CVD chamber gas signals and the residual gas background in the differentially pumped Vision 2000-C analyser housing, the closed ion source enables ppb-level detection for trace contaminants in the process gas.


Vision 2000-C Residual Gas Analyser for CVD: Technology

  • CVD process compatible materials throughout
  • Heated analyser housing
  • Unibloc inlet valve
  • Dual filament high conductance closed ion source
  • Process Eye Professional control platform
Residual Gas Analyser for CVD Applications 


Simultaneous Display/Wide Dynamic Range: Unibloc Intelligent Inlet Valve:
CVD Residual Gas Analysers Software CVD Residual Gas Analyser Inlet 


Vision 2000-C CVD Residual Gas Analysers


Mass Range 1-300 amu
Detector Dual Faraday/SEM
Analyser Double filter quadrupole mass spectrometer
Inlet Pressure Ranges

1E-8 to 1E-3 Torr base range

0.1, 0.5, 1.5, 5, 10, 40, 100 or 700 Torr

Max Operating Pressure 1E-3 Torr at the inlet 
Min Detectable Partial Pressure <2E-11 Torr 
Min Detectable Concentration <200 ppb for non-interfering species
Stability Better than +/- 0.1 amu over 8 hours
Resolution Better than 10% valley throughout mass range


Download Data Sheet: icon Vision2000C Data Sheet (301.75 kB)

We also have a simple Introduction to Mass Spectrometry that might be of interest and there are many more resources in our Links section.

For additional information on these services, if you have any questions, or to request a quotation, please contact us.

 
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