Residual Gas Analysers

MKS eVision2 & MicroVision2 residual gas analysers are the lowest cost and highest specification residual gas analyser manufactured in, and locally supported from, the UK.

The range includes web-enabled residual gas analysers, analytical double and triple filter quadrupole mass spectrometers, and both high pressure and differentially pumped process residual gas analysers. Standard mass range options are 100, 200 and 300amu. Analytical range options include high resolution 1-6amu for e.g. He/D₂ discrimination.

As standard, all instruments feature the latest in smart head technology, delivering real-time on line analysis for vacuum diagnostics and process control in general vacuum, UHV and XHV applications.

Residual Gas Analysers (RGA) for Vacuum Applications:

The new range of eVision2 residual gas analysers with web-enabled technology deliver unrivalled data acquisition speed and quality not possible with previous RGA designs. Patented technology ensures millisecond data point collection even over the full dynamic measurement range and without any loss of data quality. Perfect for rapid leak detection, accurate vacuum diagnostics, chamber diagnostics and contamination monitoring, eVision2 residual gas analysers provide all the answers...fast.

Residual Gas Analysers (RGA) & Quadrupole Mass Spectrometers for Analytical UHV Applications:

Microvision 2 is the latest innovation in RGA technology from MKS, designed to meet all of the traditional requirements for an RGA sensor but with data collection at speeds unachievable with previous generation technologies, perfect for e.g. UHV TPD applications. In addition, the Microvision 2 is designed to collect data at millisecond speeds per data point even when measuring data over the full dynamic range of the RGA. This capability has been achieved without sacrificing any of the necessary robustness, reliability and support which have made MKS the world leader in RGA products over the widest range of applications from semiconductor tools or particle accelerators to high precision R&D applications.

Resdiual Gas Analysers (RGA) for High Pressure Vacuum Processing Applications: The HPQ2 and HPQ2S represent the latest in pump free, high pressure process residual gas analyser technology, with performance consistent with traditional residual gas analysers. The HPQ2 and HPQ2S residual gas analyser range are ideal for a wide range of vacuum related process monitoring applications because they operate at higher process pressures and do not require a support pumping package. The resulting system is less complex, with reduced installation and ongoing service requirements, offering a higher level of reliability at a substantially lower cost.