Vacuum components, instruments and complete custom made solutions for general vacuum applications, vacuum based atomic & molecular physics and chemistry, thin film growth and UHV surface analysis.
 
 
Residual Gas Analysers:

MKS residual gas analysers. The lowest cost and highest specification residual gas analyser manufactured in, and locally supported from, the UK. The range includes web-enabled residual gas analysers, analytical double and triple filter quadrupole mass spectrometers, and both high pressure and differentially pumped process residual gas analysers. Standard mass range options are 100, 200 and 300amu. Analytical range options include high resolution 1-6amu for e.g. He/D2 discrimination.

 

Residual Gas Analysers for Vacuum Processing:

MKS Process Residual Gas Analysers are innovative in-situ process monitoring instruments that are fully integrated and field proven application-specific packages. The range includes the latest smart head technology delivering real-time on line analysis for vacuum diagnostics and process control in etching, thin film deposition (PVD and CVD) and plasma modification processes.


Electrical Plasma Diagnostic Instruments:

The Impedans range of electrical plasma diagnostic instruments represent the forefront of advanced diagnostics for process control and characterisation of low pressure plasmas. Automated Langmuir Probes, Retarding Field Ion Energy Analysers & Plasma Impedance Probes deliver comprehensive characterisation and control in;

- PECVD
- Etch
- PVD (DC/Pulsed Magnetron/HIPIMS)
- Plasma Polymerisation & Surface Modification
- Ion Beam Analysis

 

Plasma Treatment Equipment:

Plasma treatment equipment is used to modify the surfaces of materials such as polymers, textiles, ceramics and metals. The modification takes just minutes, is environmentally friendly and does not effect the bulk material properties in any other way. Different treatments are available to produce surface properties that are either ultra-clean, highly activated (to increase bonding properties), completely liquid-repellant or totally wettable.

 

Atmospheric Inlet Mass Spectrometers from MKS:

The Cirrus range comprises purpose built benchtop mass spectrometers for on-line monitoring and analysis of gases and gas mixtures from atmospheric pressure processes. They are ideal for R&D, process monitoring and control in fuel cell applications, off-gas measurement, TGA coupling,  catalysis studies, membrane studies, fermentation process monitoring and thermal analysis etc. Gas compositions can be tracked in real time over a wide dynamic range (ppb to percentage levels). The heated transfer line ensures a rapid response to changes in gas composition. Versions are available with single inlet, 4, 8 or 16 way inlet.

 

On-Line Process Gas Analysers from InProcess:

InProcess Instruments specialise in the development of flexible solutions for customer-specific problems in on-line gas analysis. The individually configured equipment is combined in a modular style complete with application specific software to form accurate, dedicated process analysis solutions. We provide dedicated solutions to common process and quality control issues in application areas such as pharmaceautical drying, chemical synthesis, membrane permeation, He-D2 analysis, lamp gas analysis, environmental monitoring and isotopic studies, to name just a few.

 
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