For in-situ measurement of;

- ion energy distribution (IEDF)
- ion flux
- ion current
- electron flux
- electron energy distribution (EEDF)

The Semion™ RFEA System is a retarding field ion & electron flux/energy analyser for use on grounded, DC, or RF biased electrodes and in both pulsed (including HIPMS) and continuous wave plasmas. It does not require differential pumping and provides analysis of both Ion Energy Distribution and Flux over a wide range of conditions and with a resolution of <1eV.

The high energy tail of the electron energy distribution function (EEDF) is also measured and comparison with Langmuir probe measurements shows exceptional agreement in the energy region where both devices overlap. Additionally, for the specific case of a sinusoidal radio-frequency driving signal applied to the electrode, the analyser is capable of clearly resolving between ions with different mass.

SemionTM Applications: The Semion™ System finds many applications in research and industry. Beam quality can be monitored in sputtering systems, and bimodal ion energy distributions may be observed in RF biased systems. Time resolved measurements for pulsed DC applications (e.g. HIPIMS) are effortless by synchronising the Semion™ acquisition system with the source generator.  Semion Ion Energy and Flux Analysis System Brochure

 Download our latest Application Notes:

 Time Resolved Ion Energy and Flux from Pulsed Plasmas

 EEDF Tail Measurement with the Semion RFEA

You can also find more references to recently published work in our links section.

Example Data:

IED’s with 2 MHz RF bias at various potentials. Discharge pressure = 2mTorr:	IED’S for various bias frequencies with fixed potential:

Related Products: ALP Langmuir Probe, Octiv VI Probe, Custom Vacuum Systems

For additional information, to request a quotation, or for a live online demonstration please contact us