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ALP (Automated Langmuir Probe) System for plasma measurement. The most innovative Langmuir Probes for real time, accurate measurement of key plasma parameters such as EEDF, plasma potential and electron & ion densities.
Impedan's range of Automated Langmuir Probes (ALP) are the world's most advanced Langmuir Probe System with specifications that far exceed every other commercial probe. They are suited for both time resolved measurements in pulsed plasmas (including HIPIMS) as well as fast and accurate measurement of continuous wave plasmas. ALP probe hardware, electronics and analysis routines are backed by in-depth knowledge and represent the very latest examples of best practice in Langmuir probe measurement.
ALP Langmuir Probes enable both time and spatially resolved measurements of the following plasma parameters:
- Floating potential, Vf
- Plasma potential, Vp
- Electron density, Ne
- Ion density, Ni
- Electron temperature, kTe
- Electron energy distribution function (EEDF) It can be operated without modification in DC/Pulsed DC/RF and microwave plasmas. Download Measurement Overview:  Plasma Measurement with the ALP - Automated Langmuir Probe (426.55 kB) Download Brochure: ALP Langmuir Probes System Brochure (175.03 kB) The objective of any Langmuir Probe system design is that the system can be operated by an inexperienced operator and give reliable results. We support this with a system which is easy to operate and automatically provides the required analysis results using the very latest in hardware, data acquisition and analysis techniques. Time Resolved A high-speed "advanced boxcar" mode enables high resolution time-resolved measurements in pulsed plasmas: - Shortest time-step resolution = 25nS, the highest of any commercially available Langmuir Probe.
- Fastest data sampling rate = 40MSPS, means significantly better S/N characteristics, & therefore data quality, than any other probe.
- Trigger frequencies up to 1MHz.
- Fully programmable delay allows gating of the system measurements.
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AVS Award
The AVS Exhibitor Product Recognition Committee has chosen the Impedans Deposition Tolerant Langmuir Probe as one of the top five most innovative products presented at the Exhibitor Workshop Sessions at AVS-55. These products are rated as "best-of-the-best" products at the AVS Exhibit. You can read the abstract here.
You can also find more references to recently published work in our links section.
| Intuitive Software:
A Langmuir Probe system can provide the following parameters: floating potential, Vf, plasma potential, Vp, electron density, Ne, ion density, Ni, electron temperature, kTe, and electron energy distribution function (EEDF).
The probe can obtain data as a function of position with a resolution of a fraction of a millimeter and in time with temporal resolution of less than microseconds.
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ALPTM Automated Langmuir Probe System
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| Probe
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| DC/Pulsed DC/Microwave plasmas
| standard probe
| RF plasmas
| broadband probe
| Probe length
| 300mm to 1.4m, others on request
| Probe diameter
| 2mm to 5mm
| Customisation
| 45 degree bend, 90 degree bend, multiple bends
| Max. probe operating temperature
| 230 oC without cooling
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| Measured Plasma Parameters
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| Floating Potential (Vf)
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| Plasma Potential (Vp)
| -100V to 50V
| | Plasma Density (Ne) | 1E8 to 1E12 m-3 | Electron Temperature (kTe)
| 0.1eV to 10eV | Ion Current Density (Ni)
| 1 μA/cm² to 10 mA/cm²
| Electron Energy Distribution Function (EEDF)
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| Control Unit
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| IV scan range
| -150V to +150V, 4.5mV resolution
| Current range
| 100pA to 100mA (200mA pulsed)
| Communication
| USB2.0
| Sampling rate
| 40 MSPS (V,I)
| Time Resolved step resolution (boxcar mode)
| 25nS | | External trigger | TTL compatible, 1MHz |
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| Application Software
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| | Operating system | Windows 2000/XP/Vista/Windows 7 |
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| Automated Linear Drive System
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| Stroke
| 300mm, 600mm, 900mm, 1.4m, others on request
| Maximum speed
| 25mm/sec | Step resolution
| 0.025mm | Bakeout temperature
| 230 oC
| Vacuum leak rate
| better than 1 x 10-10 mbar.l.sec-1 |
Related products: Semion Retarding Field Energy Analyser, Octiv VI Probe, Custom Vacuum Systems For additional information, to request a quotation, or for a live online demonstration please contact us.
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