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ALP (Automated Langmuir Probe) Systems for plasma diagnostics. The most innovative Langmuir Probes for real time, accurate measurement of key plasma parameters such as EEDF, plasma potential and electron & ion densities.
The Impedan's range of Automated Langmuir Probes (ALP) are the world's most advanced Langmuir Probe System with specifications that far exceed every other commercial probe. They are suited for both time resolved measurements in pulsed plasmas (including HIPIMS) as well as fast and accurate measurement of continuous wave plasmas. ALP langmuir Probe hardware, electronics and analysis routines are backed by in-depth knowledge and represent the very latest examples of best practice in Langmuir probe measurement.
Langmuir Probes Measure:
- Floating potential, Vf
- Plasma potential, Vp
- Electron density, Ne
- Ion density, Ni
- Electron temperature, kTe
- Electron energy distribution function (EEDF) The ALP Langmuir Probes can be operated without modification in DC/Pulsed DC/RF and microwave plasmas. Download ALP Langmuir Probe Measurement Overview:  Plasma Measurement with the ALP - Automated Langmuir Probe (426.55 kB) Download ALP Langmuir ProbeBrochure: ALP Langmuir Probes System Brochure (175.03 kB) The objective of any Langmuir Probe system design is that the system can be operated by an inexperienced operator and give reliable results. We support this with a system which is easy to operate and automatically provides the required analysis results using the very latest in hardware, data acquisition and analysis techniques. Time Resolved Langmuir ProbesA high-speed "advanced boxcar" mode enables high resolution time-resolved Langmuir probe measurements in pulsed plasmas: - Shortest time-step resolution = 12.5nS, the highest of any commercially available Langmuir Probe.
- Fastest data sampling rate = 80MSPS, means significantly better S/N characteristics, & therefore data quality, than any other Langmuir probe.
- Trigger frequencies up to 1MHz.
- Fully programmable delay allows gating of the system measurements.
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AVS Award: Deposition Tolerant Langmuir ProbeThe AVS Exhibitor Product Recognition Committee has chosen the Impedans Deposition Tolerant Langmuir Probe as one of the top five most innovative products presented at the Exhibitor Workshop Sessions at AVS-55. These products are rated as "best-of-the-best" products at the AVS Exhibit. You can read the abstract here.
You can also find more references to recently published work in our links section.
| Intuitive Software for Langmuir Probes:
A Langmuir Probe system can provide the following parameters: floating potential, Vf, plasma potential, Vp, electron density, Ne, ion density, Ni, electron temperature, kTe, and electron energy distribution function (EEDF).
Langmuir Probes probe can obtain data as a function of position with a resolution of a fraction of a millimeter and in time with temporal resolution of less than microseconds.
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ALPTM Automated Langmuir Probe System |
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| Probe
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| DC/Pulsed DC/Microwave plasmas
| standard probe
| RF plasmas
| broadband probe 2MHz - 100MHz
| Probe length
| 300mm to 1.4m, others on request
| Probe diameter
| 2mm to 5mm
| Customisation
| 45 degree bend, 90 degree bend, multiple bends
| Max. probe operating temperature
| 230 oC without cooling
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| Measured Plasma Parameters
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| Floating Potential (Vf)
| -145V to 145V
| Plasma Potential (Vp)
| -100V to 145V
| | Plasma Density (Ne) | 1E8 to 1E12 cm-3 | Electron Temperature (kTe)
| 0.1eV to 15eV | Ion Current Density (Ni)
| 1 μA/cm² to 30 mA/cm²
| Electron Energy Distribution Function (EEDF)
| 0-100eV
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| Control Unit
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| IV scan range
| -150V to +150V, 4.5mV resolution
| Current range
| 100pA to 150mA, 100pA resolution
| Communication
| USB2.0
| Sampling rate
| 80 MSPS (V,I)
| Time Resolved step resolution (boxcar mode)
| 12.5nS | | External trigger | TTL compatible, 1MHz |
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| Application Software
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| | Operating system | Windows 2000/XP/Vista/Windows 7 |
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| Automated Linear Drive System
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| Stroke
| 300mm, 600mm, 900mm, 1.4m, others on request
| Maximum speed
| 25mm/sec | Step resolution
| 0.025mm | Bakeout temperature
| 230 oC
| Vacuum leak rate
| better than 1 x 10-10 mbar.l.sec-1 |
Related products: Semion Retarding Field Energy Analyser, Octiv VI Probe, Custom Vacuum Systems For additional information, to request a quotation, or for a live online demonstration please contact us.
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